Thermal Mass Flow Meters
MODEL# 600-9SAN & 600-9UHP

Inline Thermal Mass Flow Meter


Key Features

  • Measurement of both Gases & Liquids
  • Available as Flow Switch
  • 316L Electro-Polished Stainless Steel Material
  • 10—15 RA Internal Finish
  • Robust Welded Construction
  • “CIP / SIP” Clean in place design
  • 100:1 Turndown Available
  • Unobstructed Flow Thru Tube
  • No Moving Parts
  • Negligible Pressure Drop
  • Tri-Clamp, VCO, VCR, and Stub Weld Process Connections
  • Available in sizes from ⅛” OD to 4” OD Tube
  • Designed & Manufactured in the USA

Proven Success in the following Applications & Processes:

  • DI Water for CIP processes
  • UHP & Clean Gas Measurement
  • Semiconductor processes
  • Pharmaceutical processes
  • Food & Beverage processes


  • Media: Liquid or Gas 
  • Accuracy: ± .50% of Full Scale or 2% of Reading. Full Scale over calibrated range. 
  • Repeatability: ± 0.2% of Rate 
  • Response Time: 1 to 2 Seconds for Gases. < 500ms for Liquids. 
  • Turndown: Up to 100:1 
  • Fluid Temperature: Span ± 50°F from operating temperature 


  • Material: 316L Electro-Polished Stainless Steel 
  • Internal Finish: 10—15 RA 
  • Sizing: ⅛” to 4” Tubing 
  • Flow Path: Unobstructed 
  • Connections: Tri-Clamp, VCO, VCR, and Tube Ends 

Electronic Transmitter: 

  • Mounting: Integral (Model # 9500PI) or Remote (Model # 9500PR, 9200B, 926A) 
  • Outputs: Flow, Totalized Flow, and Temperature 
  • Output Signal: 4-20mADC, Pulse, Hart, RS485 Modbus 
  • Display: 8 Digit Flow & Totalized Flow  
  • Optional programmable transmitter to allow changes to Line Size, Filter Factor, Flow Factor, and  Flow Cutoff Factor.  


Thermal Mass Flow Meters for Clean,  Sanitary, and Ultra High Pure Application

Thermal Instrument Mass Flow Meters have been used across many industries in a variety of liquid and gas applications. We introduced our unobstructed  in-line model  for sanitary, clean, and ultra high pure applications  in the 1980’s. Since then, they have been utilized in pharmaceutical, semiconductor, and numerous food and beverage applications to name a few. The flow element can be supplied with an integral or choice of remote electronic transmitters that provide Flow, Totalized Flow, and Temperature outputs. Upon request, Thermal Instrument can deliver a flow instrument that has been cleaned, pressure, and particle tested in a Class 100 Cleanroom.